Benefits of on-wafer calibration standards fabricated in membrane technology

Benefits of on-wafer calibration standards fabricated in membrane technology

Blog Article

In this work we compare on-wafer calibration standards fabricated in membrane technology with standards built in conventional thin-film technology.We perform this comparison by investigating WHITE THYME the propagation of uncertainties in the geometry and material properties to the broadband electrical properties of the standards.For coplanar waveguides used as line standards the analysis based on Monte Fusewire Carlo simulations demonstrates an up to tenfold reduction in uncertainty depending on the electromagnetic waveguide property we look at.